FUJIKURA COMPOSITES for Air Cylinders, Pressure Regulators, Pneumatic Equipment

Semiconductor

IC test handler/Bonding

BF cylinder
(FC/SC/PC Series)

Usage (Applications)	Absorbs device flexion and gently brings the terminals into contact with the inspection socket (by pressing with a cylinder). When bonding, the processing head is brought into contact with the workpiece.
Features	Adopts BF diaphragm for the sliding parts. Achieves smooth stroke with low friction. No need for lubricating oil. Does not stick even after long periods of non-use. Operates with low pressure and responds sensitively to pressure changes.
Benefits	Enables small load control (conventional air cylinders have frictional resistance, making it difficult to control small loads). Supplies optimal load with high precision (conventional air cylinders may have discrepancies between the set and actual loads). No need to prepare a lubricator. Hard to cause sticking problems.

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Air bearing cylinder
(ACS/ACD series)

Usage (Applications)	Absorbs device flexion and gently brings the terminals into contact with the inspection socket (by pressing with a cylinder). When bonding, the processing head is brought into contact with the workpiece.
Features	Adopts air bearings for the rod guide section. Achieves ultimate low friction with zero sliding resistance.
Benefits	Enables small load control (conventional air cylinders have frictional resistance, making it difficult to control small loads). Supplies optimal load with high precision (conventional air cylinders may have discrepancies between the set and actual loads). Air bearing cylinders have no wear and have good response to pressure supply (conventional rubber seals wear down over time). Hard to cause sticking problems.

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CMP/Polishing Process

BF cylinder
(FC/SC/PC series)

Usage (Applications)	Pressure control for dresser head. Pressure control for polisher head. Click here for usage examples of BF cylinders and regulators.
Features	Adopts BF diaphragm for the sliding parts. Achieves smooth stroke with low friction. No need for lubricating oil. Does not stick even after long periods of non-use. Operates with low pressure and responds sensitively to pressure changes.
Benefits	Small load control is feasible (conventional air cylinders have friction resistance making small load control difficult). Precisely supplying optimal loads (conventional air cylinders have discrepancies between the set load and actual load). No need for a lubricator. Less likely to experience seizing troubles.

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Air bearing cylinder
(ACS/ACD series)

Usage (Applications)	Pressure control for dresser head. Pressure control for polisher head. Chamber cover lifting and lowering.
Features	Air bearings are used in the rod guide section. Achieves ultimate low friction with zero sliding resistance.
Benefits	This air cylinder allows for precise control of small loads, a challenge in traditional air cylinders due to frictional resistance. It provides precise and optimal load supply, unlike conventional air cylinders that often exhibit differences between set and actual loads. The air bearing cylinder exhibits good reaction to pressure supply and is free from wear, unlike conventional rubber-sealed cylinders that wear over time.

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Cleaning equipment

Air relay
(RR series)

Usage (Applications)	Supply of compressed air to the air cylinder.
Features	Air-operated type. Equipped with a precision regulator suitable for clean room use. Good pressure and flow characteristics. Minimal impact on secondary pressure due to primary pressure fluctuations.
Benefits	Suitable for use in clean rooms. Good pressure, flow, and relief characteristics for maximum utilization of cylinder function. Remote operation is possible without electricity, making it usable in explosion-proof areas.

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Air bearing cylinder
(ACS/ACD series)

Usage (Applications)	Pressure control for wiping after cleaning. Click here for case studies of special cylinders.
Features	Adoption of air bearings in the rod guide section. Achieving ultimate low friction with zero sliding resistance.
Benefits	Capable of controlling small loads (conventional air cylinders have frictional resistance and it is difficult to control small loads). Accurately supply the optimal load (conventional air cylinders tend to have a difference between the set load and the actual load). The air bearing cylinder has no wear and has a good response to pressure supply (conventional rubber seals wear out over time).

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Secondary battery

Handling equipment for electrode sheets (coaters, slitters, etc.)

Air relay
(RR series)

Usage (Applications)	Air supply to the air cylinder.
Features	Air-operated type. Equipped with a precision regulator for clean room use. Good pressure and flow characteristics. Minimal influence on secondary pressure due to fluctuations in primary pressure.
Benefits	Can be used in clean rooms. Good pressure, flow, and relief characteristics maximize cylinder functionality. Remote operation is possible without electricity. Can be used in explosion-proof areas.

Detail

BF cylinder
(special copper-free model)

Usage (Applications)	This is used as an actuator for dancer rolls. The controller adjusts the air pressure based on the value detected by the tension sensor, and the precise output based on that air pressure is achieved with a smooth stroke. Click here for case studies of special cylinders.
Features	BF diaphragm is used in sliding parts. Low friction for smooth stroke. No need for lubricating oil. It does not get stuck even after long-term shutdown. It operates with low pressure and responds sensitively to pressure fluctuations.
Benefits	Capable of controlling small loads (conventional air cylinders have frictional resistance, making it difficult to control small loads). Provides optimal load supply with high precision (conventional air cylinders have differences between the set load and the actual load). No need for a lubricator. Less likely to experience sticking troubles.

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Medical

Oxygen concentrator

Air regulator

Usage (Applications)	Installed inside the housing for pressure adjustment.
Features	Compact and lightweight (33g). Low-leakage design. Low-pressure compatible model. 　- Set pressure range: 0-45kPa (6.5psi) 　- Supply pressure: 200kPa Max. (29psi)
Benefits	Low leakage rate Excellent pressure characteristics Customizable options available: 　- Integrated check valve model 　- Integrated flow control valve model

Detail

Resin check valve

Usage (Applications)	Prevention of backflow.
Features	Compact and lightweight (3g) Low cracking pressure (less than 1kPa) Simple structure using umbrella seals
Benefits	Minimal number of components resulting in high yield rate. Cost-effective. Suitable for low-pressure environments.

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Insufflator

Air regulator

Usage (Applications)	Installed inside the housing for pressure adjustment.
Features	Compact design for space-efficient use. Minimal leakage due to its low-leak design. Low-pressure compatible model. 　- Pressure range is adjustable from 0 to 45kPa (6.5psi). 　- Maximum supply pressure of 200kPa (29psi)
Benefits	Low leakage rate Excellent pressure characteristics Customizable options available: 　- Integrated check valve model 　- Integrated flow control valve model

Detail

Resin check valve

Usage (Applications)	Prevention of backflow.
Features	Compact and lightweight (3g) Low cracking pressure (less than 1kPa) Simple structure using umbrella seals
Benefits	Minimal number of components resulting in high yield rate. Cost-effective. Suitable for low-pressure environments.

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Anesthesia device

Relief valve

Usage (Applications)	Relief valve
Features	Compact design for easy installation in limited space. Accurate cracking pressure pre-set at the factory. Wide range of sizes and cracking pressures available for selection. Body materials include brass and SUS. Seal material is FKM, with the option for special orders of Kalrez®.
Benefits	Can be installed in a compact space. Enables stable and highly reliable operation. Versatile model that can be used for various applications. After the valve is opened and resealed, it does not leak and allows the machine or equipment to function as intended.

Detail

Check valve

Usage (Applications)	Check valve
Features	Compact design for space-saving installation. Compatible with both compressed air and liquid. Body material options include brass and stainless steel. Seal material is FKM, with the option for special orders of Kalrez®.
Benefits	It is possible to install the equipment in a compact space. The design of the equipment makes it difficult to damage the sealing material. The body of the equipment is made of low-corrosion material, specifically SUS. The equipment is a universal model capable of accommodating various applications. To prevent equipment troubles, a backflow prevention mechanism has been incorporated into the design.

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Dialysisi machine

Liquid regulator
(RF Series)

Usage (Applications)	Pressure adjustment for dialysate and RO water.
Features	Main body material: PPSU. Lightweight: 102g. Set pressure range: 0-60KPa (8.7psi). Maximum supply pressure: 600kPa.
Benefits	Precise pressure control is possible. Lower cost compared to equipment with a SUS body. Resistant to chemical degradation. 　Hypochlorous acid 　Acetic acid 　Peroxyacetic acid 　Citric acid 　Sodium carbonate 　Hydrogen peroxide

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Self-Powered Liquid Detection Sensor

Usage (Applications)	'The device is installed internally and emits a signal in case of liquid leakage trouble.
Features	Automatic start by simply dripping a liquid (water, blood, urine, etc.) onto the sensor. Capable of self-generating and transmitting detection signals (via Bluetooth or BLT). Compact and space-saving.
Benefits	Enables early detection of equipment malfunctions. Capable of detecting blood and chemical leaks in medical settings. Can be installed without wires or batteries.

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Intravenous drip and Infusion circuit

Disposable check valve

Usage (Applications)	check valve
Features	Body made of resin and silicone rubber. Compact design. Cracking pressure: 2kPa (after priming cleaning). Minimum differential pressure of the orifice: 15kPa (water). Flow rate of 550ml~/min (at 100kPa).
Benefits	Produced in a clean room, making it ideal for applications with strict hygiene management and quality requirements. High cost performance due to the ability to mass-produce. Low risk of contamination.

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Silicone molded products

Usage (Applications)	Seals and check valves.
Features	LIM molding. Manufactured in a Class 100,000 clean room. Standard lineup includes three hardness levels (20, 50, and 70°). ※ Other hardness levels are also available as options.
Benefits	Ideal for applications with strict hygiene and quality requirements, as it is produced in a clean room. Cost-effective with the ability for large-scale production. Low possibility of contamination. Capable of producing large quantities of complex molded products.

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Other general industries

Printing equipment, Coater, Laminator

Electropneumatic transducer
(RT series)

Usage (Applications)	Air supply to the air cylinder.
Features	High resolution and excellent linearity. No power supply required. No restrictions on mounting orientation.
Benefits	Allows for precise control, maximizing the characteristics of the cylinder. Can be installed in narrow spaces where power supply is difficult to obtain.

Detail

BF cylinder

Usage (Applications)	Used for actuating dancer rolls. The controller adjusts the air pressure based on the value from the tension sensor to achieve accurate output based on the air pressure with a smooth stroke. Click here for usage examples of BF cylinders and regulators.
Features	BF diaphragm is used in sliding parts. Smooth stroke with low friction. No lubricating oil required. Will not seize even after long-term storage. Operates at low pressure and responds sensitively to pressure fluctuations.
Benefits	It is capable of controlling small loads (conventional air cylinders have frictional resistance, making it difficult to control small loads). It can supply optimal loads with high accuracy (conventional air cylinders have differences between set loads and actual loads). There is no need to prepare a lubricator. It is less likely to experience seizure issues.

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