FVH series becomes a high load type adopting our bellows type air spring.
It realized high vibration isolation characteristics and thin profile.
■The thin film bellows with good respo nse and the large flow rate actuator make it possible to keep the stroke fluctuation to a small value even when the moving stage with a large load moves on the device.
■Because it adopts a thin bellows system, it has a thin vibration isolator structure. The FVH - 2400F realized a height of 169 mm[6.65in.] (in neutral). Therefore, it is possible to keep the center of gravity of the equipment to be mounted low.
■Floor vibration reduction of precision equipment
Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measuring equipment, precision processing machine, other precision equipment etc.