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FVH series(Active-type)

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FVH series becomes a high load type adopting our bellows type air spring.
It realized high vibration isolation characteristics and thin profile.

FVH series(Active-type)

Features

■The thin film bellows with good respo nse and the large flow rate actuator make it possible to keep the stroke fluctuation to a small value even when the moving stage with a large load moves on the device.
■Because it adopts a thin bellows system, it has a thin vibration isolator structure. The FVH - 2400F realized a height of 169 mm[6.65in.] (in neutral). Therefore, it is possible to keep the center of gravity of the equipment to be mounted low.

Applications

■Floor vibration reduction of precision equipment
Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measuring equipment, precision processing machine, other precision equipment etc.

Application

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Specifications

Specifications

About bellows type air spring

  • Based on diaphragm manufacturing technology, bellows type air spring which has very thin but high durability has been developed and adopted for our anti-vibration table.
  • About bellows type air spring

Model designation

Model designation

Characteristic


Characteristic

Model designation

Model designation

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